The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Apr. 24, 2008
Michihiko Hayashi, Fukui, JP;
Masahiro Yasumi, Osaka, JP;
Shoji Okamoto, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
An upper adhesion layerformed between a piezoelectricity layerand an upper electrode layerso as to abut on the piezoelectricity layerand the upper electrode layeris included. The upper adhesion layerincludes a first tungsten layermade of tungsten in which an α phase and a β phase coexist and a second tungsten layermade of α-phase tungsten. The first tungsten layeris configured so as to abut on the piezoelectricity layer. It is possible to obtain a piezoelectric device which is capable of improving the adhesion property of both the piezoelectricity layer and the electrode layer and reducing a basic point voltage fluctuation at the time of high-temperature operation so as to improve reliability.