The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Feb. 22, 2010
Alan S. Chen, Windermere, FL (US);
Taeho Kook, Orlando, FL (US);
Kurt G. Steiner, Orlando, FL (US);
Stephen A. Neston, Orlando, FL (US);
Timothy J. Daniel, Orlando, FL (US);
Alan S. Chen, Windermere, FL (US);
Taeho Kook, Orlando, FL (US);
Kurt G. Steiner, Orlando, FL (US);
Stephen A. Neston, Orlando, FL (US);
Timothy J. Daniel, Orlando, FL (US);
Triquint Semiconductor, Inc., Orlando, FL (US);
Abstract
A SAW device having metal electrodes on a surface of the piezoelectric substrate includes a dielectric layer deposited on the surface. Depositing the layer results in seams extending upward from the electrodes extending above the surface of the substrate. An additional seam results from one seam extending from one electrode joining a second seam extending from an adjacent electrode within the dielectric layer and is generally formed above the height of the electrodes. The additional seam is removed through planarization or the like. The dielectric layer may be further planarized for providing a thickness of the dielectric layer above the electrodes as desired.