The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Dec. 05, 2008
Keiichi Mori, Tokyo, JP;
Yoshichika Kato, Tokyo, JP;
Satoshi Yoshida, Tama, JP;
Kenji Kondou, Tokyo, JP;
Yoshihiko Hamada, Tokyo, JP;
Osamu Imaki, Tokyo, JP;
Keiichi Mori, Tokyo, JP;
Yoshichika Kato, Tokyo, JP;
Satoshi Yoshida, Tama, JP;
Kenji Kondou, Tokyo, JP;
Yoshihiko Hamada, Tokyo, JP;
Osamu Imaki, Tokyo, JP;
Japan Aviation Electronics Industry Limited, Tokyo, JP;
Abstract
A microminiature moving device has disposed on a single-crystal silicon substrate movable elements such as a movable rod and a movable comb electrode that are displaceable in parallel to the substrate surface and stationary parts that are fixedly secured to the single-crystal silicon substrate with an insulating layer sandwiched between. Depressions are formed in the surface regions of the single-crystal silicon substrate where no stationary parts are present and the movable parts are positioned above the depressions. The depressions form gaps large enough to prevent foreign bodies from causing shorts and malfunctioning of the movable parts.