The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Jul. 22, 2008
Ho Sup Kim, Gimhae-si, KR;
Sang Soo OH, Changwon-si, KR;
Tae Hyung Kim, Daegu, KR;
Dong Woo Ha, Changwon-si, KR;
Kyu Jung Song, Changwon-si, KR;
Hong Soo Ha, Changwon-si, KR;
Rock Kil Ko, Gimhae-si, KR;
Nam Jin Lee, Sacheon-si, KR;
Ho Sup Kim, Gimhae-si, KR;
Sang Soo Oh, Changwon-si, KR;
Tae Hyung Kim, Daegu, KR;
Dong Woo Ha, Changwon-si, KR;
Kyu Jung Song, Changwon-si, KR;
Hong Soo Ha, Changwon-si, KR;
Rock Kil Ko, Gimhae-si, KR;
Nam Jin Lee, Sacheon-si, KR;
Abstract
Disclosed herein is a gradient thin film, formed on a substrate by simultaneously depositing different materials on the substrate using a plurality of thin film deposition apparatuses provided in a vacuum chamber, wherein the gradient thin film is formed such that the composition thereof is continuously changed depending on the thickness thereof by deposition control plates provided in the path through which the different materials move to the substrate. The gradient thin film is advantageous in that the thin film is formed by simultaneously depositing different materials using various deposition apparatuses, so that the composition thereof is continuously changed depending on the thickness thereof, with the result that the physical properties of a thin film are easily controlled and the number of deposition processes is decreased, and thus processing time and manufacturing costs are decreased, thereby improving economic efficiency.