The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 25, 2011
Filed:
Oct. 16, 2008
Tetsuya Abe, Naka-gun, JP;
Toshihisa Hatano, Naka-gun, JP;
Hajime Hiratsuka, Naka-gun, JP;
Koichi Hasegawa, Naka-gun, JP;
Yasuhide Tajima, Naka-gun, JP;
Soichiro Omachi, Tokyo, JP;
Tetsuya Abe, Naka-gun, JP;
Toshihisa Hatano, Naka-gun, JP;
Hajime Hiratsuka, Naka-gun, JP;
Koichi Hasegawa, Naka-gun, JP;
Yasuhide Tajima, Naka-gun, JP;
Soichiro Omachi, Tokyo, JP;
Japan Atomic Energy Agency, Ibaraki, JP;
Nikkin Flux Inc., Tokyo, JP;
Abstract
A gas amount measuring device including a vacuum container, a first pipe, an air release valve being attached to the first pipe, a second pipe, a calibration gas generator being attached to the first pipe, a third pipe, a vacuum gauge, a first valve, a leak valve, a second valve, a turbomolecular pump, a third valve, and a roughing pump being attached to the third pipe in order from a vacuum container side, a first bypass pipe connecting the third pipe between the vacuum container and the first valve to the third pipe between the leak valve and the second valve, a fourth valve being attached to the first bypass pipe, and a second bypass pipe connecting the third pipe between the leak valve and the second valve to the third pipe between the third valve and the roughing pump, a fifth valve being attached to the second bypass pipe.