The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Mar. 26, 2009
Kinya Ashikaga, Tokyo, JP;
Kinya Ashikaga, Tokyo, JP;
Oki Semiconductor Co., Ltd., , JP;
Abstract
In order to provide a thin-film resistor and a manufacturing method thereof capable of restraining reduction of a Q-value of varactor by reducing a parasitic capacitance between the resistor and the substrate, the thin-film resistor includes a semiconductor substrateincluding an integrated circuithaving a plurality of electrode padsplaced in a distance from each other in the most upper part of a plurality of stacked interconnections, and the integrated circuithaving a passivation filmformed between the plurality of electrode pads; a secondary interconnectionselectrically connected to the electrode pads; an insulating filmformed in a place in between the secondary interconnectionson the passivation film; and a resistorformedin a predetermined place in between the secondary interconnectionson the insulating film