The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jan. 15, 2009
Applicants:
Bernhard Winkler, Regensburg, DE;
Mohsin Nawaz, Unterhaching, DE;
Florian Schoen, Munich, DE;
Inventors:
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/125 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.