The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jul. 25, 2006
Young-dong Lee, Yougin-si, KR;
Igor Antonovich Kossyi, Moscow, RU;
Mamikon Aramovich Misakyan, Moscow, RU;
Merab Ivanovich Taktakishvili, Moscow, RU;
Young-dong Lee, Yougin-si, KR;
Igor Antonovich Kossyi, Moscow, RU;
Mamikon Aramovich Misakyan, Moscow, RU;
Merab Ivanovich Taktakishvili, Moscow, RU;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A microwave resonance plasma generating apparatus, a plasma processing system having the same and a method of generating a microwave resonance plasma are provided. The apparatus includes a microwave generating unit which generates a microwave, and a plasma producing unit which produces electrons and photons of high energy using the microwave generated from the microwave generating unit. The plasma producing unit includes a coaxial waveguide having an inner electrode disposed adjacent to the microwave generating unit, an outer electrode connected to the microwave generating unit and disposed to coaxially surround a portion of the inner electrode, the outer electrode being shorter than the inner electrode, and a dielectric tube disposed between the inner electrode and the outer electrode to insulate between the inner electrode and the outer electrode. The coaxial waveguide utilizes a principle of 'cut or truncated electrode of coaxial waveguide' and a resonance phenomenon of Langmiur.