The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Jun. 26, 2009
Applicants:
Ivan Petrov Ivanov, Apple Valley, MN (US);
Wei Tian, Bloomington, MN (US);
Mallika Kamarajugadda, Eden Prairie, MN (US);
Paul E. Anderson, Eden Prairie, MN (US);
Inventors:
Ivan Petrov Ivanov, Apple Valley, MN (US);
Wei Tian, Bloomington, MN (US);
Mallika Kamarajugadda, Eden Prairie, MN (US);
Paul E. Anderson, Eden Prairie, MN (US);
Assignee:
Seagate Technology LLC, Scotts Valley, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a layer of alpha-tantalum on a substrate including the steps of depositing a layer of titanium nitride on a substrate; and depositing a layer of alpha-tantalum on the layer of titanium nitride, wherein the deposition of the alpha-tantalum is carried out at temperatures below about 300° C.