The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Nov. 27, 2007
Applicants:
Ju Won Kim, Seoul, KR;
Ki Hoon Choi, Cheonan-shi, KR;
Jung Keun Cho, Seoul, KR;
Kyo Woog Koo, Cheonan-shi, KR;
Jung Bong Choi, Seoul, KR;
Inventors:
Ju Won Kim, Seoul, KR;
Ki Hoon Choi, Cheonan-shi, KR;
Jung Keun Cho, Seoul, KR;
Kyo Woog Koo, Cheonan-shi, KR;
Jung Bong Choi, Seoul, KR;
Assignee:
Semes Co., Ltd., , KR;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
Abstract
A spin head includes chucking pins configures to chuck and unchuck a substrate. Contact portions of the chucking pins and the substrate are varied during a process to prevent a treating solution from remaining at the contact portions.