The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2011

Filed:

Feb. 25, 2009
Applicant:

Yee-chung Fu, Fremont, CA (US);

Inventor:

Yee-Chung Fu, Fremont, CA (US);

Assignee:

Advanced NuMicro Systems, Inc., San Jose, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A micro-electro-mechanical system (MEMS) mirror device has a mirror, a frame rotatively coupled to the mirror, and a uniaxial actuator rotatively coupled to the frame where the rotational axis of the actuator is offset from the rotational axes of the mirror and the frame. Another MEMS mirror device has a mirror, a frame rotatively coupled to the mirror, and a biaxial actuator rotatively coupled to the frame where the actuator is able to rotate about the rotational axes of the mirror and the frame with the mirror.


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