The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Aug. 01, 2008
Bradley P. Barber, Acton, MA (US);
Craig E. Carpenter, Shirley, MA (US);
Paul P. Gehlert, Sterling, MA (US);
Christopher F. Shepard, Nashua, NH (US);
Bradley P. Barber, Acton, MA (US);
Craig E. Carpenter, Shirley, MA (US);
Paul P. Gehlert, Sterling, MA (US);
Christopher F. Shepard, Nashua, NH (US);
Avago Technologies Wireless IP (Singapore) Pte.Ltd., Singapore, SG;
Abstract
According to an exemplary embodiment, a method of forming a multi-layer electrode for growing a piezoelectric layer thereon includes a step of forming a high conductivity metal layer over a substrate. The method further includes a step of forming a seed layer over the high conductivity metal layer. The method further includes a step of forming a high density metal layer over the seed layer. The method further includes a step of forming a piezoelectric layer over the high density metal layer. The high conductivity metal layer, the seed layer, and the high density metal layer form the multi-layer electrode on which the piezoelectric layer is grown.