The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
May. 29, 2009
Takao Kusaka, Yokohama, JP;
Nobuki Yoshimatsu, Kawasaki, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Takao Kusaka, Yokohama, JP;
Nobuki Yoshimatsu, Kawasaki, JP;
Susumu Yasuda, Tsukuba, JP;
Junichi Seki, Yokohama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.