The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2011
Filed:
Feb. 19, 2010
Applicant:
Yoichi Okita, Kawasaki, JP;
Inventor:
Yoichi Okita, Kawasaki, JP;
Assignee:
Fujitsu Semiconductor Limited, Yokohama, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
Abstract
A plurality of origin patterns () containing a metal catalyst are formed over a semiconductor substrate (). Next, an insulating film () covering the origin patterns () is formed. Next, a trench allowing at the both ends thereof the side faces of the origin patterns () to expose is formed. Thereafter, a wiring is formed by allowing carbon nanotubes () having a conductive chirality to grow in the trench. Thereafter, an insulating film covering the carbon nanotubes () is formed.