The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2011

Filed:

Oct. 17, 2005
Applicants:

Seiji Goto, Aichi, JP;

Hideo Yamakoshi, Kanagawa, JP;

Atsushi Ueda, Tokyo, JP;

Kenichi Okamoto, Tokyo, JP;

Yuji Asahara, Kanagawa, JP;

Minoru Danno, Kanagawa, JP;

Inventors:

Seiji Goto, Aichi, JP;

Hideo Yamakoshi, Kanagawa, JP;

Atsushi Ueda, Tokyo, JP;

Kenichi Okamoto, Tokyo, JP;

Yuji Asahara, Kanagawa, JP;

Minoru Danno, Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/50 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inner electrode for barrier film formation is an inner electrode for barrier film formation that is inserted inside a plastic container having an opening, supplies a medium gas to the inside of the plastic container, and supplies high frequency power to an outer electrode arranged outside the plastic container, thereby generating discharge plasma on the inner surface of the plastic container to form a barrier film on the inner surface of the plastic container, and that is provided with a gas supply pipe () having a gas flow path () to supply a medium gas (G) and an insulating member () screwed into an end portion of the gas supply pipe () to be flush therewith and having a gas outlet () communicated with the gas flow path ().


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