The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Mar. 26, 2009
Sergey Pidin, Kawasaki, JP;
Sergey Pidin, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
A semiconductor device having: a semiconductor substrate; an isolation trench formed in a surface portion of the semiconductor substrate and defining an NMOSFET active region and a PMOSFET active region; a silicon oxide film burying only a lower portion of the isolation trench and defining a recess above the lower portion; an NMOSFET structure formed in the NMOSFET active region and having an insulated gate electrode structure and n-type source/drain regions; a PMOSFET structure formed in the PMOSFET active region and having an insulated gate electrode structure and p-type source/drain regions; a tensile stress film covering the NMOSFET structure and extending to the recess surrounding the NMOSFET active region and to the recess outside the PMOSFET active region along a gate width direction; and a compressive stress film covering the PMOSFET structure and extending to the recess outside the PMOSFET active region along a channel length direction.