The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 2011

Filed:

May. 12, 2003
Applicants:

Yongchul Ahn, Eagan, MN (US);

Kaichiu Wong, Sunnyvale, CA (US);

Venuka Jayatilaka, Savage, MN (US);

Inventors:

Yongchul Ahn, Eagan, MN (US);

Kaichiu Wong, Sunnyvale, CA (US);

Venuka Jayatilaka, Savage, MN (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor structure has a substrate having a trench, an isolation dielectric in the trench, and a stress buffer layer, between the substrate and the dielectric. Semiconductor devices containing the semiconductor structure may have higher reliability, and may have a reduced manufacturing costs per device.


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