The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Sep. 29, 2008
Daiyu Kondo, Kawasaki, JP;
Akio Kawabata, Kawasaki, JP;
Shintaro Sato, Kawasaki, JP;
Taisuke Iwai, Kawasaki, JP;
Mizuhisa Nihei, Kawasaki, JP;
Daiyu Kondo, Kawasaki, JP;
Akio Kawabata, Kawasaki, JP;
Shintaro Sato, Kawasaki, JP;
Taisuke Iwai, Kawasaki, JP;
Mizuhisa Nihei, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
According to a method of manufacturing carbon nanotubes, minute concavities and convexities are formed at a surface of a substrate, a catalyst metal layer having a predetermined film thickness is formed on the surface having the concavities and convexities, the substrate is subject to a heat treatment at a predetermined temperature to change the catalyst metal layer into a plurality of isolated fine particles. The catalyst metal fine particles have a uniform particle diameter and uniform distribution. Then, the substrate supporting the plurality of fine particles is placed in a carbon-containing gas atmosphere to grow carbon nanotubes on the catalyst metal fine particles by a CVD method using the carbon-containing gas. The carbon nanotubes can be formed to have a desired diameter and a desired shell number with superior reproducibility.