The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Jan. 12, 2009
Applicants:
Adrian Salinas, Garland, TX (US);
Joel Peterson, Pottsboro, TX (US);
Inventors:
Adrian Salinas, Garland, TX (US);
Joel Peterson, Pottsboro, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01); B08B 3/00 (2006.01); B08B 3/12 (2006.01); B08B 6/00 (2006.01); B05C 11/00 (2006.01); B05C 13/00 (2006.01); B05C 13/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A cleaning system which can be integrated into a coater track system for use in the production of semiconductor devices and methods for its use are provided. The cleaning system can include a series of nozzles having assorted configurations and features which provide uniform and efficient rinsing of excess material.