The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Sep. 08, 2009
Applicants:
Edward B. Ripley, Knoxville, TN (US);
Roland D. Seals, Oak Ridge, TN (US);
Jonathan S. Morrell, Knoxvlle, TN (US);
Inventors:
Edward B. Ripley, Knoxville, TN (US);
Roland D. Seals, Oak Ridge, TN (US);
Jonathan S. Morrell, Knoxvlle, TN (US);
Assignee:
Babcock & Wilcox Technical Services Y-12, LLC, Oak Ridge, TN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); H05B 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method for initiating a process gas plasma. A conductive plate having a plurality of conductive fingers is positioned in a microwave applicator. An arc forms between the conductive fingers to initiate the formation of a plasma. A transport mechanism may convey process materials through the plasma. A spray port may be provided to expel processed materials.