The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 2011
Filed:
Nov. 21, 2007
Jyh-shin Chen, Hsin-Chu, TW;
Sheng-wen Chen, Chung Li, TW;
Hui-ling Kao, Chung Li, TW;
Yu-sheng Kung, Hsin-Chu, TW;
Yu-hsin Lin, Hsin-Chu, TW;
Yi-chiuen HU, Hsin-Chu, TW;
Jyh-Shin Chen, Hsin-Chu, TW;
Sheng-Wen Chen, Chung Li, TW;
Hui-Ling Kao, Chung Li, TW;
Yu-Sheng Kung, Hsin-Chu, TW;
Yu-Hsin Lin, Hsin-Chu, TW;
Yi-Chiuen Hu, Hsin-Chu, TW;
Precision Instrument Development Center, Hsin-Chu, TW;
Abstract
A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefore is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrate, a silicon layer divided by an etched window with a first portion on the insulating layer and a second portion suspended above the indentation, a piezoelectric layer on the first and the second portions of the silicon layer, and at least an electrode on the piezoelectric layer.