The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2011

Filed:

Oct. 10, 2007
Applicant:

Morio Takahashi, Tokyo, JP;

Inventor:

Morio Takahashi, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 6/12 (2006.01); H01L 21/00 (2006.01); G02F 1/01 (2006.01); B05D 5/06 (2006.01); C23C 16/513 (2006.01); C23C 14/34 (2006.01); C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The thermo-optic phase shifter () according to an exemplary aspect of the invention includes: a substrate (); a sacrificial layer () formed above the substrate (); a first cladding layer () formed above the sacrificial layer () and having a film density higher than that of the sacrificial layer (); an optical waveguide core () formed above the first cladding layer (); a second cladding layer () provided over the first cladding layer () to cover the optical waveguide core (); a heat-generating heater () provided to a region of the second cladding layer () directly above the optical waveguide core (); and a groove () formed in a side face region of the optical waveguide core () and extending from the surface of the second cladding layer () to the surface of the substrate ().


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