The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Oct. 10, 2006
Theodoor Gertrudis Silvester Maria Rijks, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Theodoor Gertrudis Silvester Maria Rijks, Eindhoven, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
EPCOS AG, Munich, DE;
Abstract
A micro-electromechanical device has a substrate (), a movable element (), a pair of electrodes () arranged on the substrate and on the movable element to move the movable element, and a controller () to supply the electrodes. To move the movable element to an intermediate position one or more pulses are applied during the movement, timed to compensate for under or over damping of the movement. This can reduce a settling delay. It can be applied to tunable RF capacitors. To control a decrease in the gap, a single pulse of a maximum supply level compensates for the inherent slowness of the device and over damping. To compensate for under damping, the pulses have a period corresponding to a resonant frequency, and comprise peaks and troughs above and below the final supply level, such that successive ones of the peaks and troughs are closer to the given supply level.