The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Apr. 02, 2009
Hyunwoo Kim, Asan-si, KR;
Youngchae Ko, Cheoan-si, KR;
Sungjong Pyo, Asan-si, KR;
Taeho Keem, Cheoan-si, KR;
Hyunwoo Kim, Asan-si, KR;
Youngchae Ko, Cheoan-si, KR;
Sungjong Pyo, Asan-si, KR;
Taeho Keem, Cheoan-si, KR;
Samsung Corning Precision Materials Co., Ltd., Jinpyeong-Dong, Gumi-Si, Gyeingsangbuk-Do, KR;
Abstract
The present invention relates to an apparatus for detecting particles on a glass surface and a method thereof, and more specifically, to an apparatus for detecting particles on a glass surface and a method thereof for exactly inspecting particles which may be created on a glass surface where micro circuits are deposited. The apparatus for detecting the particles on the glass surface in accordance with the present invention comprises laser beam irradiators for detecting particles on a glass substrate on upper and lower sides of the glass substrate at certain intervals, respectively, and wherein the irradiators are configured so that beams emitted from the laser beam irradiators can be irradiated in a direction vertical to a transferring direction of the glass substrate, thereby exactly detecting particles detached to the glass surface without exception.