The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 27, 2011

Filed:

Jun. 14, 2007
Applicants:

Kunihiko Nakamura, Osaka, JP;

Michiaki Matsuo, San Jose, CA (US);

Yoshito Nakanishi, Osaka, JP;

Akinori Hashimura, Portland, OR (US);

Inventors:

Kunihiko Nakamura, Osaka, JP;

Michiaki Matsuo, San Jose, CA (US);

Yoshito Nakanishi, Osaka, JP;

Akinori Hashimura, Portland, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/24 (2006.01); H03H 9/46 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.


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