The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
Feb. 29, 2008
Applicants:
Kunio Akedo, Nagoya, JP;
Atsushi Miura, Nagoya, JP;
Koji Noda, Ichinomiya, JP;
Hisayoshi Fujikawa, Seto, JP;
Inventors:
Kunio Akedo, Nagoya, JP;
Atsushi Miura, Nagoya, JP;
Koji Noda, Ichinomiya, JP;
Hisayoshi Fujikawa, Seto, JP;
Assignee:
Kabushiki Kaisha Toyota Chuo Kenkyusho, Aichi-gun, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A barrier film formed on top of a substrate, a barrier film formed so as to cover a functional element region fabricated on top of a substrate, or a barrier film formed on both a substrate and a functional element region, wherein the barrier film includes at least one layer of a silicon nitride film formed by laminating two or more silicon nitride layers having different Si/N composition ratios.