The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 27, 2011
Filed:
May. 14, 2007
Steven Edward Birrell, Bozeman, MT (US);
Alan Cable, San Jose, CA (US);
Joel Visser, Manhattan, MT (US);
Lydia J. Young, Palo Alto, CA (US);
Justin Kwak, Mountain View, CA (US);
Joachim Eldring, Bozeman, MT (US);
Thomas H. Bailey, San Jose, CA (US);
Alberto Pique, Crofton, MD (US);
Raymond Auyeung, Alexandria, VA (US);
Steven Edward Birrell, Bozeman, MT (US);
Alan Cable, San Jose, CA (US);
Joel Visser, Manhattan, MT (US);
Lydia J. Young, Palo Alto, CA (US);
Justin Kwak, Mountain View, CA (US);
Joachim Eldring, Bozeman, MT (US);
Thomas H. Bailey, San Jose, CA (US);
Alberto Pique, Crofton, MD (US);
Raymond Auyeung, Alexandria, VA (US);
Photon Dynamics, Inc., San Jose, CA (US);
The United States of America as represented by the Secretary of the Navy, Arlington, VA (US);
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.