The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Oct. 02, 2008
Todd J. Brill, Round Rock, TX (US);
Michael Teferra, Los Gatos, CA (US);
Amitabh Puri, San Jose, CA (US);
Daniel R. Jessop, Eagle Mountain, UT (US);
Glade L. Warner, Sandy, UT (US);
David C. Duffin, Sandy, UT (US);
Todd J. Brill, Round Rock, TX (US);
Michael Teferra, Los Gatos, CA (US);
Amitabh Puri, San Jose, CA (US);
Daniel R. Jessop, Eagle Mountain, UT (US);
Glade L. Warner, Sandy, UT (US);
David C. Duffin, Sandy, UT (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one aspect, a method is provided for electronic device manufacturing. The method includes receiving a request to transfer a carrier to or from a first substrate loading station of an electronic device manufacturing facility, and assigning one of a plurality of carrier supports to carry out the transfer based on a spacing on either side of the assigned carrier being greater than an acceptable spacing. Numerous other aspects are provided.