The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Jan. 04, 2007
Michael W. Quillen, Kingsport, TN (US);
L Palmer Holbrook, Kingsport, TN (US);
John Cleaon Moore, Camarillo, CA (US);
Michael W. Quillen, Kingsport, TN (US);
L Palmer Holbrook, Kingsport, TN (US);
John Cleaon Moore, Camarillo, CA (US);
Eastman Chemical Company, Kingsport, TN (US);
Abstract
A method for removing common contaminates or residues which include but are not limited to ionic residues, particulate residues and moisture from semiconductor wafers used in the manufacture of IC (integrated circuits), liquid crystal displays and flat panel displays. The process includes the use of certain esters or certain esters combined with particular co-solvents. The cleaning method may be utilized in a variety of cleaning processes or process steps and offers economic and performance advantages.