The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Jan. 30, 2008
Shintarou Hara, Fukuoka, JP;
Osamu Watanabe, Kumamoto, JP;
Kazumi Sadamatsu, Kumamoto, JP;
Yuuji Toyomura, Fukuoka, JP;
Eiji Fujii, Osaka, JP;
Shintarou Hara, Fukuoka, JP;
Osamu Watanabe, Kumamoto, JP;
Kazumi Sadamatsu, Kumamoto, JP;
Yuuji Toyomura, Fukuoka, JP;
Eiji Fujii, Osaka, JP;
PANASONIC Corporation, Osaka, JP;
Abstract
One objective of the invention is to provide a highly-efficient and reliable piezoelectric thin film device by improving the piezoelectric function of a piezoelectric thin film and obtaining a crystal structure wherein the dependency of a piezoelectric constant, relative to a voltage, is superior, and to also provide a method for manufacturing this piezoelectric thin film device. Another objective of the invention is to provide an inkjet head that satisfactorily exhibits the piezoelectric performance of the piezoelectric thin film device and that has a superior withstand voltage function and driving reliability, and to provide a high quality inkjet recording apparatus on which this inkjet head can be mounted. A piezoelectric thin film device includes: crystal grains that form piezoelectric thin film and grain boundaries that encircle the crystal grains, wherein the same crystal orientation is established for the grain boundaries and the crystal grains.