The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Aug. 06, 2010
Osamu Onitsuka, Chiba, JP;
Kazuyoshi Sugama, Chiba, JP;
Osamu Onitsuka, Chiba, JP;
Kazuyoshi Sugama, Chiba, JP;
Seiko Instruments Inc., Chiba, JP;
Abstract
A method for manufacturing a plurality of piezoelectric vibrators includes forming, in the lid substrate wafer, a plurality of cavity recesses forming a plurality of through-electrodes in and through the base substrate wafer; bonding the plural piezoelectric vibration members to the upper face of the base substrate wafer via routing electrodes; overlaying the base substrate wafer and the lid substrate wafer; bonding the base substrate wafer and the lid substrate wafer; and cutting the two bonded wafers into the plural piezoelectric vibrators. Forming the plurality of through-holes includes disposing electroconductive core members having two flat ends and a thickness substantially equal to that of the base substrate wafer, in the plurality of through-holes, and disposing connection members between the core members and the through-holes; and firing the connection members at a predetermined temperature to integrally fix the through-hole, the connection member and the core member to each other.