The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 2011
Filed:
Jun. 04, 2010
Kiyoshi Aratake, Chiba, JP;
Yasuo Kawada, Chiba, JP;
Kiyoshi Aratake, Chiba, JP;
Yasuo Kawada, Chiba, JP;
Seiko Instruments Inc., Chiba, JP;
Abstract
There is provided a method of manufacturing piezoelectric vibrators. The method includes a process for through holesand, which pass through a base substrate wafer, so that openings of the through holes are opened to the outside of the recesses for cavities C; a process for patterning a bonding layer, pairs of mounting layers, and pairs of extraction electrode layersandon the upper surface of the base substrate wafer with the same conductive material; and a process for electrically isolating the extraction electrode layersin the middle by irradiating a part (area S) of the extraction electrode layers, which are formed between the bonding layer and openings of through holes, with laser light after both the wafers are anodically bonded to each other. The bonding layersurrounds the recesses, the pairs of mounting layers are in the recesses, and the pairs of extraction electrode layersandelectrically connect the pairs of mounting layers to the bonding layer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile