The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Oct. 17, 2006
Sang-wook Kwon, Seongnam-si, KR;
Jong-seok Kim, Hwaseong-si, KR;
In-sang Song, Seoul, KR;
Sang-hun Lee, Seoul, KR;
Dong-kyun Kim, Suwon-si, KR;
Jung-han Choi, Yongin-si, KR;
Young-tack Houng, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Sang-wook Kwon, Seongnam-si, KR;
Jong-seok Kim, Hwaseong-si, KR;
In-sang Song, Seoul, KR;
Sang-hun Lee, Seoul, KR;
Dong-kyun Kim, Suwon-si, KR;
Jung-han Choi, Yongin-si, KR;
Young-tack Houng, Suwon-si, KR;
Che-heung Kim, Yongin-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A downward type micro electro mechanical system (EMS) switch and a method of fabricating the same is provided. The downward type MEMS switch includes first and second cavities formed in a substrate, first and second actuators formed on upper portions of the first and second cavities, first and second fixing lines formed on an upper surface of the substrate and not overlapped with the first and second cavities, and a contact pad which is spaced apart at a predetermined distance from surfaces of the first fixing line and the second fixing line but which can be contacted with the first fixing line and the second fixing line when the first actuator and the second actuator are driven. The contact pad, which is actuated downward by piezoelectricity, is fabricated as it shares a layer with a RF signal line, after the RF signal line is fabricated.