The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2011

Filed:

Dec. 04, 2006
Applicants:

Hiroshi Nakayama, Nagano, JP;

Mitsuhiro Nagaya, Nagano, JP;

Yoshio Yamada, Nagano, JP;

Inventors:

Hiroshi Nakayama, Nagano, JP;

Mitsuhiro Nagaya, Nagano, JP;

Yoshio Yamada, Nagano, JP;

Assignee:

NHK Spring Co., Ltd., Yokohama-Shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A probe card includes probes that are made of a conductive material and come into contact with a semiconductor wafer to receive or output an electric signal; a probe head that holds the probes; a substrate that has a wiring pattern corresponding to a circuit structure for generating a signal for a test; a reinforcing member that reinforces the substrate; an interposer that is stacked on the substrate for connection of wires of the substrate; a space transformer that is stacked between the interposer and the probe head and transforms intervals among the wires; and a plurality of first post members that have a height greater than the thickness of the substrate, and are embedded in a portion of the substrate on which the interposer is stacked.


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