The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8017920 B1

PDF
Full Text
Expired
Date of Patent:
Sep. 13, 2011

Filed:

Nov. 29, 2007
Applicants:

Taku Suzuki, Tsukuba, JP;

Yasushi Yamauchi, Tsukuba, JP;

Inventors:

Taku Suzuki, Tsukuba, JP;

Yasushi Yamauchi, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/252 (2006.01);
U.S. Cl.
CPC ...
Abstract

A spin polarized ion beam generation apparatus () can efficiently generate a spin polarized ion by using a pumping light generator () to an ion in a high frequency discharge tube () to irradiate optical pumping () by circularly polarized light and linearly polarized light orthogonal to each other to a metastable atom. For example, a polarized helium ion beam having a spin polarization rate that exceeds 18% and that is as high as 25% can be generated. The spin polarized ion beam generation apparatus () also can be applied to a processing apparatus and an analysis apparatus that can irradiate a polarized ion beam to a specimen. According to the spin polarized ion scattering spectroscopy apparatus, the spin status in a region at a depth of about 2 to 3 atomic layers from the surface of the specimen can be measured while discriminating the elements from the atomic layer with a reduced measurement time and with a high accuracy impossible in the conventional technique.


Find Patent Forward Citations

Suzuki, Taku. (2011). Spin polarized ion beam generation apparatus and scattering spectroscopy apparatus using the spin polarized ion beam and specimen processing apparatus (U.S. Patent No. 8017920). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8017920

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