The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 13, 2011

Filed:

Jan. 13, 2009
Applicants:

Kenji Yoneda, Kyoto, JP;

Kazuma Takahashi, Hyogo, JP;

Inventors:

Kenji Yoneda, Kyoto, JP;

Kazuma Takahashi, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thermal cycle includes: increasing a temperature from an initial temperature to a temperature Tat an arbitrary rate R(° C./sec); holding the temperature at the temperature Tfor an arbitrary period t(sec); increasing the temperature from the temperature Tto a temperature Tat a rate R(° C./sec) of 1.0×10(° C./sec) or less; and holding the temperature at the temperature Tfor a period t(sec) of 50 msec or less. The thermal cycle thereafter includes: decreasing the temperature from the temperature Tto the temperature Tat a rate R' (° C./sec) of 1.0×10(° C./sec) or less; holding the temperature Tfor an arbitrary period t(sec); and decreasing the temperature from the temperature Tto a final temperature at an arbitrary rate R′ (° C./sec). Such a thermal cycle is successively repeated in a plurality of iterations.


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