The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Feb. 10, 2006
Tetsuo Korenaga, Saga, JP;
Ryuji Nagadome, Fukuoka, JP;
Tetsuo Korenaga, Saga, JP;
Ryuji Nagadome, Fukuoka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
In a plasma treatment apparatus for performing plasma treatment by accommodating a substrate in a treatment chamber, a fixed guideand a movable guidemade of a ceramic are arrayed in an X direction (in a substrate transporting direction) for guiding both side end portions of the substrate held on a ceramic-made mounting plate, and both end portions of the movable guideare supported by supporting members. In this construction, these supporting members are fitted to fixed membersA andB arranged in a Y direction with the mounting plateplaced therebetween, such that an interval in the Y direction is adjustable. Consequently, the ceramic-made guide membercan be mounted and demounted without directly bolting it, and it is possible to prevent the generation of an abnormal discharge by using as objects multiple product thin-type substrates with different widthwise dimensions.