The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 2011
Filed:
Apr. 26, 2007
Kenji Takemasa, Yamaguchi, JP;
Toshihiko Fuse, Hyogo, JP;
Mitsuru Kudari, Hyogo, JP;
Masanobu Ninomiya, Hyogo, JP;
Kenji Takemasa, Yamaguchi, JP;
Toshihiko Fuse, Hyogo, JP;
Mitsuru Kudari, Hyogo, JP;
Masanobu Ninomiya, Hyogo, JP;
Teijin Pharma Limited, Tokyo, JP;
Nippon Pillar Packing Co., Ltd., Osaka, JP;
Abstract
A rotary valve comprising sliding members for supplying treatment gas containing water vapor to a plurality of treatment processes is provided. The rotary valve comprises sliding members (), through which open flow passages (), having sliding surfaces slidable to each other and a mechanical seal mechanism for switching the flow passages () while sealing fluid by preliminarily pressing the sliding surfaces, wherein the sliding surface of each sliding members () is made of hydrophobic material () different in hardness from the other.