The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
May. 30, 2008
Ashesh Parikh, Frisco, TX (US);
Willie J. Yarbrough, Sunnyvale, CA (US);
Ashesh Parikh, Frisco, TX (US);
Willie J. Yarbrough, Sunnyvale, CA (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A method of generating a scalable OPC model for composing reticle pattern files from IC layouts using 2D test patterns is disclosed. The 2D test patterns include basic features which replicate features found in advanced ICs. Variations of feature dimensions and structure pitches provide measurement data which enables the scalability of the OPC model. A method of checking reticle pattern files for features which cannot be modeled by the scalable OPC model is also disclosed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile