The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Jul. 21, 2010
Applicant:
Michael P. Nesnidal, Shakopee, MN (US);
Inventor:
Michael P. Nesnidal, Shakopee, MN (US);
Assignee:
Rosemount Aerospace Inc,, Burnsville, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 (2006.01); G02B 27/44 (2006.01); G02F 1/13 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a membrane structure for a diffractive phased array assembly is provided. The method includes the steps of providing a wafer having a body and at least a membrane layer and a backside layer disposed on opposite faces of the body, forming a grating pattern on a surface of the membrane layer, and forming a window through the wafer to expose a back surface of the membrane, thereby allowing light to pass through the membrane.