The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Sep. 24, 2007
Kazuhito Shimoda, Kanagawa, JP;
Ryo Koshiishi, Kanagawa, JP;
Satoshi Tomioka, Kumamoto, JP;
Hideo Kawabe, Saitama, JP;
Kazuhito Shimoda, Kanagawa, JP;
Ryo Koshiishi, Kanagawa, JP;
Satoshi Tomioka, Kumamoto, JP;
Hideo Kawabe, Saitama, JP;
Sony Corporation, Tokyo, JP;
Abstract
A laser processing apparatus includes a support table, a local exhaust device, and a laser light source unit. The support table supports a processing object. The local exhaust device directs laser light into a local exhaust unit in which pressure is locally adjusted over the support table. The laser light source unit outputs the laser light. The local exhaust device is capable of relatively being lifted from the support table by injecting a lift gas to the support table. The processing object includes a multilayer film formed of two or more layers with different materials. An input unit into which reflectance of the processing object is inputted is connected to the laser light source unit.