The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Mar. 30, 2007
Edward Nelson Fuller, Manchester, MI (US);
Harry A. Hunnicutt, Lynden, WA (US);
Edward Nelson Fuller, Manchester, MI (US);
Harry A. Hunnicutt, Lynden, WA (US);
Microstaq, INC, Austin, TX (US);
Abstract
A MEMS device is disclosed having a single microvalve actuator for controlling multiple microvalves. Exemplary embodiments include a MEMS device including two microvalves formed on a beam positioned by an actuator, the two microvalves controlling separate flow paths between two separate pairs of ports; a device with a two-way pilot operated microvalve and a four-way pilot microvalve for controlling the two-way pilot operated microvalve; a device with two three-way microvalves actuated by a common microvalve actuator; and a two-way microvalve with a moveable microvalve element and a feedback port formed in the moveable element operable to regulate the pressure on an end of the moveable element relative to the movement of the moveable element between the first position and the second position. Also disclosed is a MEMS device including a beam with a plurality of apertures formed therein, resulting in a mass reduction of at least 10 percent.