The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8010912 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 30, 2011

Filed:

Mar. 07, 2008
Applicants:

Vincent Chen, Newport Beach, CA (US);

Vahid Manian, Coto de Caza, CA (US);

Inventors:

Vincent Chen, Newport Beach, CA (US);

Vahid Manian, Coto de Caza, CA (US);

Assignee:

Broadcom Corporation, Irvine, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract

Provided is a method to design an integrated circuit. The method reduces a time delay between introduction of a new lithography process and a start of production. A first semiconductor mask is designed at a first process feature size. The first process feature size can be based on an anticipated process feature size of the new lithography process. A second semiconductor mask is created by enlarging the first semiconductor mask to a second process feature size for which production is available. Thus, the second process feature size is larger than the first process feature size. An integrated circuit (IC) is fabricated with the second semiconductor mask. After the new semiconductor process has been developed and is available for production, another IC is fabricated with the first semiconductor mask.


Find Patent Forward Citations

Chen, Vincent. (2011). Method of shrinking semiconductor mask features for process improvement (U.S. Patent No. 8010912). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8010912

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