The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
May. 04, 2007
Applicants:
Y. Sean Lin, Irvine, CA (US);
William R. Clements, Iii, Austin, TX (US);
Alexander T. Schwarm, Austin, TX (US);
Inventors:
Y. Sean Lin, Irvine, CA (US);
William R. Clements, III, Austin, TX (US);
Alexander T. Schwarm, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 3/01 (2006.01); G06F 11/07 (2006.01); G21C 21/02 (2006.01); H04B 3/46 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.