The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Jan. 05, 2006
Matthias Brunner, Kirchheim-Heimstetten, DE;
Ralf Schmid, Poing, DE;
Bernhard Mueller, Finsing, DE;
Axel Wenzel, Augsburg, DE;
Matthias Brunner, Kirchheim-Heimstetten, DE;
Ralf Schmid, Poing, DE;
Bernhard Mueller, Finsing, DE;
Axel Wenzel, Augsburg, DE;
Applied Materials GmbH, Dresden, DE;
Abstract
The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period Pin the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions Lwith the beam target period P, which is larger than half of the structure period P, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period Pfrom the structure period Pand/or in the beam target position Lfrom the position L.