The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Nov. 11, 2008
Yong Jai Choi, Daejeon, KR;
Won Chegal, Daejeon, KR;
Hyun MO Cho, Daejeon, KR;
Abstract
The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source (); a beam splitting part () for splitting a light generated in the light source () into a polarized light; an objective lens () for concentrately irradiating some of light split by the beam splitting part () onto a specimen (); a photodetector () for detecting the light passed through the objective lensand the beam splitting part () after reflected from the specimen () with unit cells; and a central processing unit () for correcting the intensity of the light detected by the photodetector () into a value corresponding to the unit cell of the photodetector () along multiple incidence plane passage of 360° with respect to respective incidence angles and processing the corrected value.