The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Oct. 03, 2008
Applicant:
Hiroyuki Wada, Utsunomiya, JP;
Inventor:
Hiroyuki Wada, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention provides an exposure apparatus configured to expose a pattern of an original on a substrate through a projection optical system. The apparatus comprises a holding unit configured to hold the projection optical system, at least three anti-vibration mounts configured to support the holding unit, and at least three supporting members configured to support the at least three anti-vibration mounts respectively. The at least three supporting members are independent of each other without connecting to each other.