The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Mar. 08, 2006
Applicants:
Michael Kröll, Linsengericht, DE;
Stefan Heberer, Gelnhausen-Meerholz, DE;
Stipan Katusic, Bad Soden, DE;
Michael Krämer, Schöneck, DE;
Wolfgang Lortz, Wächtersbach, DE;
Inventors:
Michael Kröll, Linsengericht, DE;
Stefan Heberer, Gelnhausen-Meerholz, DE;
Stipan Katusic, Bad Soden, DE;
Michael Krämer, Schöneck, DE;
Wolfgang Lortz, Wächtersbach, DE;
Assignee:
Evonik Degussa GmbH, Essen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01);
U.S. Cl.
CPC ...
Abstract
Aqueous cerium oxide dispersion Aqueous cerium oxide dispersion, containing 5 to 60% by weight cerium oxide. It can be used to polish SiOin the semiconductor industry.