The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 30, 2011

Filed:

Jun. 16, 2006
Applicants:

Sung Eun Kim, Woolsan-si, KR;

Tae Hyun Lim, Gumi-si, KR;

Kwang Jong Yoo, Paju-si, KR;

Byung Han Yun, Daegu-si, KR;

Yang Sik Moon, Seoul, KR;

Inventors:

Sung Eun Kim, Woolsan-si, KR;

Tae Hyun Lim, Gumi-si, KR;

Kwang Jong Yoo, Paju-si, KR;

Byung Han Yun, Daegu-si, KR;

Yang Sik Moon, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.


Find Patent Forward Citations

Loading…