The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 30, 2011
Filed:
Jun. 02, 2009
Keiichi Yoshizumi, Osaka, JP;
Masateru Doi, Osaka, JP;
Takayuki Kurata, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle θ of the stylus displacement vector D that is caused by a frictional force between a stylusand the measuring surfaceduring scanning of the measuring surfaceby the stylus. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylusrelative to the probe. Movement of an XY-stageis controlled so that the probemoves in accordance with the moving vector M.